TY  - BOOK
AU  - ; Ohring,Milton.
TI  - Materials science of thin films : deposition and structure
SN  - 9789381269534
U1  - 621.38152	OHR 
PY  - 2002///
CY  - ;San Diegox 
PB  - :Academic Press
KW  - ;Thin films
KW  - ;Couches minces
KW  - ;  Solid State Electronics
KW  - ; Semiconductors Electronics
KW  - ;Milton Ohring
KW  - ;and Materials science of thin films : deposition and structure
ER  -