TY  - BOOK
AU  - Geng, Hwaiyu
TI  - Semiconductor manufacturing handbook
SN  - 9780071445597
U1  - 621.38152 GEN 
PY  - 2005///
CY  - New York 
PB  - : McGraw-Hill
KW  - Semiconductors -- Design and construction -- Handbooks, manuals, etc
KW  - Integrated circuits -- Design and construction -- Handbooks, manuals, etc
KW  - Wafer processing
KW  - Hwaiyu Geng
KW  - Communication
ER  -