TY  - BOOK
AU  - Smith, Donald L.
TI  - Thin-film deposition: : principles and practice
SN  - 9780070585027
U1  - 621.38152 SMI 
PY  - 1995///
CY  - New York
PB  - McGraw-Hill
KW  - Donald L Smith
KW  - Thin-film deposition : principles and practice
KW  - Thin films
KW  - Vapor-plating
KW  - Thin film devices
KW  - Epitaxy
KW  - Chemical vapour deposition -- Electronics
ER  -