TY  - BOOK
AU  - Van Zant, Peter
TI  - Microchip fabrication: : a practical guide to semiconductor processing
SN  - 9780071356167
U1  - 621.38152 ZAN 
PY  - 2000///
CY  - New York
PB  - McGraw-Hill
KW  - Peter Van Zant
KW  - Microchip fabrication : a practical guide to semiconductor processing
KW  - Semiconductors -- Design and construction
KW  - Integrated circuits -- Design and construction
KW  - Integrated circuits industry -- Management
ER  -