TY  - BOOK
AU  - Bowden, M. J., 1943-
TI  - Introduction to microlithography
SN  - 9780841228485
U1  - 621.381531 BOW 
PY  - 1994///
CY  - Washington, DC
PB  - American Chemical Society
KW  - ACS professional reference book
KW  - L F Thompson; C G Willson; M J Bowden
KW  - Introduction to microlithography, 2nd edition
KW  - Photoresists -- Congresses
KW  - Plasma etching -- Congresses
ER  -