TY  - BOOK
AU  - Kal, Santiram
TI  - MEMS and Microsystems
CY  - Kharagpur
KW  - Electronics And Communication Engineering
KW  - IIT Kharagpur
KW  - MEMS and Microsystems
KW  - Microelectronics Technology for MEMS
KW  - NPTEL
KW  - Prof. Santiram Kal
UR  - http://video.snu.edu.in/index.php?id=4031&cat=Electronics And Communication Engineering&course=MEMS and Microsystems&url=Phase1_Video/117105082/lec09.mp4
ER  -