TY - BOOK AU - Kal, Santiram TI - MEMS and Microsystems: Surface and Quartz Microstructure CY - Kharagpur PB - Indian Insitiute of Technology KW - Electronics And Communication Engineering KW - IIT Kharagpur KW - MEMS and Microsystems KW - NPTEL KW - Prof. Santiram Kal KW - Surface and Quartz Microstructure UR - http://video.snu.edu.in/index.php?id=4035&cat=Electronics And Communication Engineering&course=MEMS and Microsystems&url=Phase1_Video/117105082/lec13.mp4 ER -