TY  - BOOK
AU  - Kal, Santiram
TI  - MEMS and Microsystems: MEMS Capacitive Accelerometer Process
CY  - Kharagpur
PB  - Indian Insitiute of Technology
KW  - Electronics And Communication Engineering
KW  - IIT Kharagpur
KW  - MEMS and Microsystems
KW  - MEMS Capacitive Accelerometer Process
KW  - NPTEL
KW  - Prof. Santiram Kal
UR  - http://video.snu.edu.in/index.php?id=4048&cat=Electronics And Communication Engineering&course=MEMS and Microsystems&url=Phase1_Video/117105082/lec26.mp4
ER  -