@book{29864,
	author = {Kal, Santiram},
	title = {MEMS and Microsystems:},
	publisher = {Indian Insitiute of Technology},
	address = {Kharagpur},
	url = {http://video.snu.edu.in/index.php?id=4052&cat=Electronics And Communication Engineering&course=MEMS and Microsystems&url=Phase1_Video/117105082/lec30.mp4}
}