TY  - DATA
AU  - Dasgupta, Nandita
TI  - VLSI Technology: Etching if Si, SiO2, SiN and other material 
CY  - Madras
PB  - Indian Insitiute of Technology
KW  - Dr. Nandita Dasgupta
KW  - Electronics And Communication Engineering
KW  - Etching if Si, SiO2, SiN and other material
KW  - IIT Madras
KW  - NPTEL
KW  - VLSI Technology
UR  - http://video.snu.edu.in/index.php?id=4414&cat=Electronics And Communication Engineering&course=VLSI Technology&url=Phase1_Video/117106093/lec28.mp4
ER  -