TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication: : the science of miniaturization
SN  - 9780849308260
U1  - 621.38152 MAD 
PY  - 2002///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Marc J Madou
KW  - Fundamentals of microfabrication : the science of miniaturization
KW  -  Microelectronics.
KW  -  Integrated circuits -- Design and construction.
KW  -  Microelectromechanical systems -- Design and construction.
KW  -  Microelectronic packaging.
KW  -  Lasers -- Industrial applications.
ER  -