TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and microsystems:  : design and manufacture
SN  - 9788126525805
U1  - 621.381 HSU 
PY  - 2002///
CY  - Boston
PB  -  : McGraw-Hill
KW  - Microelectromechanical systems
KW  - ;Microelectronics
KW  - ;Microelectronic packaging
KW  - ;Tai-Ran Hsu
KW  - ;McGraw-Hill
ER  -