00769nam a22002297a 4500 SNU 20150202223502.0 140814b xxu||||| |||| 00| 0 eng d 0819457361 HCL 621.381 LIE Liebmann, Lars W. Design and Process Integration for Microelectronic Manufacturing III : 3-4 March 2005. San Jose, California, USA. / Lars W. Liebmann California : SPIE , 2005. xxxv, 438 p. , 30 cm. Proceedings of SPIE Vol. 5756 Design and Process Integration for Microelectronic Manufacturing III Lars W. Liebmann SPIE International Society for Optical Engineering ddc HCL 41674 41674 1 0 ddc 0 0 SNUL SNUL 2015-02-02 0 621.381 LIE H15115 2015-02-02 00:00:00 2015-02-02 HCL