Design and Process Integration for Microelectronic Manufacturing III
: 3-4 March 2005. San Jose, California, USA
Liebmann, Lars W.
creator
text
Design and Process Integration for Microelectronic Manufacturing III
Lars W. Liebmann
SPIE
International Society for Optical Engineering
xxu
California
: SPIE
, 2005
monographic
eng
xxxv, 438 p. , 30 cm.
/ Lars W. Liebmann
621.381 LIE
Proceedings of SPIE Vol. 5756
0819457361
HCL
140814
20150202223502.0