TY  - BOOK
AU  - Liebmann, Lars W.
TI  - Design and Process Integration for Microelectronic Manufacturing III: : 3-4 March 2005. San Jose, California, USA
SN  - 0819457361
U1  - 621.381 LIE 
PY  - 2005///
CY  - California
PB  - : SPIE
KW  - Design and Process Integration for Microelectronic Manufacturing III
KW  - Lars W. Liebmann
KW  - SPIE
KW  - International Society for Optical Engineering
ER  -