TY - BOOK AU - Sankaran, R. Mohan TI - Plasma processing of nanomaterials SN - 9781439866764 U1 - 620.5 SAN PY - 2012/// CY - Boca Raton, PB - CRC Press, KW - Engineering & Aliied Operations KW - Nanostructured materials KW - Plasma engineering KW - Science -- Physics KW - Technology & Engineering - Electronics -- Microelectronics KW - Science - Nanoscience KW - R Mohan Sankaran KW - and Plasma processing of nanomaterials ER -