TY - BOOK AU - Luttge, Regina TI - Microfabrication for industrial Applications SN - 9780815515821 U1 - 620.5 LUT PY - 2010/// CY - New.York . Oxford PB - Elsevier Science KW - Engineering & Applied operations KW - Microfabrication KW - Nanotechnology KW - Chemical & Biological Sensor KW - Regina Luttge KW - and Industrial micro & nano fabrication ER -