TY  - GEN
AU  - Grove, A. S.
TI  - Physics and Technology of Semiconductor Devices
SN  - 9780471329985
U1  - 537.622 GRO 
CY  - New York
PB  - John Wiley & Sons
KW  - Physics
KW  - Technology
KW  - Semiconductor Device
KW  - Thermal Oxidation
ER  -