@book{51196,
	author = {Harsh Kalra/Mani ViG and Atul Vir Singh},
	title = {Wafer Stage Design for Photo-Lithography},
	publisher = {Electronics and Communication Engineering},
	year = {May-19},
	address = {Shiv Nadar University },
	url = {http://dspace.snu.edu.in:8080/jspui/handle/123456789/583}
}