00473nam a2200133Ia 450000500170000000800410001710000250005824500450008326000780012830000330020665500200023970000190025985600610027820190625121238.0190531s9999    xx            000 0 und d  aHarsh Kalra/Mani ViG 0aWafer Stage Design for Photo-Lithography  aShiv Nadar University bElectronics and Communication EngineeringcMay-19  a22 p.b: Hard Bound.c:29cm.  aProject Report.  aAtul Vir Singh  uhttp://dspace.snu.edu.in:8080/jspui/handle/123456789/583