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  <titleInfo>
    <title> MEMS and MOEMS Technology and Applications</title>
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  <name type="personal">
    <namePart> Rai-Choudhury, P.</namePart>
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  <genre authority="">Microelectromechanical systems-, Optoelectronic devices.-, Optoelectronic devices-, Microelectromechanical Systems-,  Rai-Choudhury, P.-and  MEMS and MOEMS Technology and Applications</genre>
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    <publisher>: SPIE Optical Engineering Press</publisher>
    <dateIssued> ©2000</dateIssued>
    <issuance>monographic</issuance>
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  <physicalDescription>
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    <extent>xi, 520 p.  : ill.  ; 27 cm.</extent>
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  <note type="statement of responsibility">/P Rai-Choudhury</note>
  <classification authority="ddc">621.381 RAI</classification>
  <relatedItem type="series">
    <titleInfo>
      <title>SPIE Press monograph, PM85</title>
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  <identifier type="isbn">9780819437167</identifier>
  <identifier type="">S.R.Book Distributors 12 Satyam Enclave, Ghaziabad-201009</identifier>
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