TY  - BOOK
AU  -  Rai-Choudhury, P.
TI  -  MEMS and MOEMS Technology and Applications
SN  - 9780819437167
U1  - 621.381 RAI 
PY  - 2000///
CY  - Wash. 
PB  - : SPIE Optical Engineering Press
KW  - Microelectromechanical systems
KW  - , Optoelectronic devices
KW  - , Microelectromechanical Systems
KW  - ,  Rai-Choudhury, P
KW  - and  MEMS and MOEMS Technology and Applications
ER  -