| 000 | 00755nam a22002297a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20140630171753.0 | ||
| 008 | 140630b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780071445597 | ||
| 028 | _aHCL | ||
| 082 | _a621.38152 GEN | ||
| 100 |
_aGeng, Hwaiyu _a; Albrecht, David J |
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| 245 |
_aSemiconductor manufacturing handbook _c/ Hwaiyu Geng |
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| 260 |
_aNew York _b: McGraw-Hill _c, ©2005. |
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| 300 |
_a1 v. (various pagings) _b: ill. _c; 25 cm. |
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| 655 | _aSemiconductors -- Design and construction -- Handbooks, manuals, etc. | ||
| 655 | _aIntegrated circuits -- Design and construction -- Handbooks, manuals, etc. | ||
| 655 | _aWafer processing | ||
| 655 | _aHwaiyu Geng | ||
| 655 | _aCommunication | ||
| 942 |
_2ddc _cHCL |
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| 999 |
_c13605 _d13605 |
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