| 000 | 00734nam a22002537a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20140730224601.0 | ||
| 008 | 140730b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780070585027 | ||
| 028 | _aHCL | ||
| 082 | _a621.38152 SMI | ||
| 100 | _aSmith, Donald L. | ||
| 245 |
_aThin-film deposition _b: principles and practice _c/ Donald L Smith |
||
| 260 |
_aNew York _bMcGraw-Hill _c1995 |
||
| 300 |
_axxiii, 616 p. _b: ill. _c24 cm. |
||
| 655 | _aDonald L Smith | ||
| 655 | _aThin-film deposition : principles and practice | ||
| 655 | _aThin films. | ||
| 655 | _aVapor-plating. | ||
| 655 | _aThin film devices. | ||
| 655 | _aEpitaxy | ||
| 655 | _aChemical vapour deposition -- Electronics | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c21674 _d21674 |
||