| 000 | 00807nam a22002417a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20140731232545.0 | ||
| 008 | 140731b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780071356167 | ||
| 028 | _aHCL | ||
| 082 | _a621.38152 ZAN | ||
| 100 | _aVan Zant, Peter | ||
| 245 |
_aMicrochip fabrication _b: a practical guide to semiconductor processing _c/ Peter Van Zant |
||
| 250 | _a4th ed. | ||
| 260 |
_aNew York _bMcGraw-Hill _c2000 |
||
| 300 |
_axvi, 632 p. _b: ill. _c23 cm. |
||
| 655 | _aPeter Van Zant | ||
| 655 | _aMicrochip fabrication : a practical guide to semiconductor processing | ||
| 655 | _aSemiconductors -- Design and construction. | ||
| 655 | _aIntegrated circuits -- Design and construction. | ||
| 655 | _aIntegrated circuits industry -- Management. | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c21811 _d21811 |
||