| 000 | 00843nam a22002537a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20140804230953.0 | ||
| 008 | 140804b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780841228485 | ||
| 028 | _aHCL | ||
| 082 | _a621.381531 BOW | ||
| 100 |
_aBowden, M. J., 1943- _aThompson, L. F., 1944- _aWillson, C. G. 1939- |
||
| 245 |
_aIntroduction to microlithography _c/ M. J. Bowden |
||
| 250 | _a2nd ed. | ||
| 260 |
_aWashington, DC _bAmerican Chemical Society _c1994 |
||
| 300 |
_axiv, 527 p. _b: ill. _c24 cm. |
||
| 440 | _aACS professional reference book. | ||
| 655 | _aACS professional reference book. | ||
| 655 | _aL F Thompson; C G Willson; M J Bowden | ||
| 655 | _aIntroduction to microlithography, 2nd edition | ||
| 655 | _aPhotoresists -- Congresses. | ||
| 655 | _aPlasma etching -- Congresses. | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c23066 _d23066 |
||