| 000 | 00899nam a22002657a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20140826211803.0 | ||
| 008 | 140826b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780849308260 | ||
| 028 | _aHCL | ||
| 082 | _a621.38152 MAD | ||
| 100 | _aMadou, Marc J. | ||
| 245 |
_aFundamentals of microfabrication _b: the science of miniaturization _c/ Marc J. Madou |
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| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton, Fla. _bCRC Press _c2002 |
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| 300 |
_a723 p. _b: col. ill. _c; 29 cm. |
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| 655 | _aMarc J Madou | ||
| 655 | _aFundamentals of microfabrication : the science of miniaturization | ||
| 655 | _a Microelectronics. | ||
| 655 | _a Integrated circuits -- Design and construction. | ||
| 655 | _a Microelectromechanical systems -- Design and construction. | ||
| 655 | _a Microelectronic packaging. | ||
| 655 | _a Lasers -- Industrial applications. | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c32993 _d32993 |
||