| 000 | 00760nam a22002297a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20141218124937.0 | ||
| 008 | 141218b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0819452882 | ||
| 028 | _a;HCL | ||
| 082 | _a621.381531 SIL | ||
| 100 | _a;Silver, Richard M. | ||
| 245 |
_aMetrology, inspection, and process control for microlithography XVIII 23-26 February 2004, Santa Clara, California, USA _c/ Richard M Silver. |
||
| 260 |
_aSanta Clara _b:SPIE _c,2004. |
||
| 300 |
_axl,720p. _c:30cm. |
||
| 655 | _a;Metrology, inspection, and process control for microlithography | ||
| 655 | _a;Microlithography | ||
| 655 | _a;SPIE | ||
| 655 | _a;International Society for Optical Engineering | ||
| 655 | _a;HCL Collection. | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c40470 _d40470 |
||