| 000 | 00611nam a22001937a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20141219111907.0 | ||
| 008 | 141219b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1892568780 | ||
| 082 | _a621.381 SEM | ||
| 100 | _aSemicon | ||
| 245 |
_aSEMI Technology Symposium _b:Innovations in semiconductor manufacturing (STS:ISM) _c/Semicon |
||
| 260 |
_a.-California _b:SEMI technical Publication _c,@2003 |
||
| 300 |
_a552p.;15cm. _bSoftcover |
||
| 440 | _a.-(SEMI technical Programs Present) | ||
| 655 | _aSEMI technical Programs | ||
| 655 | _asemiconductor manufacturing | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c40558 _d40558 |
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