| 000 | 00492nam a22001577a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20141222162639.0 | ||
| 008 | 141222b xxu||||| |||| 00| 0 eng d | ||
| 082 | _a658 SEM | ||
| 100 | _aSemi technical programs present | ||
| 245 |
_aSEMICON West 2003 _b: North American Fab Managers Forum _c/Semi technical programs present |
||
| 260 |
_a.-USA _b:Semi technical programs present _c,@2003 |
||
| 300 |
_aVarious Pages;15cm. _bSoftcover |
||
| 655 | _aSEMICON | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c40682 _d40682 |
||