| 000 | 00627nam a22002057a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20141226111121.0 | ||
| 008 | 141226b xxu||||| |||| 00| 0 eng d | ||
| 028 | _a; HCL | ||
| 082 | _a621.384134 SEM | ||
| 100 | _a; Semicon. | ||
| 245 |
_aSEMI Technology Symposium _b: Innovations in Semiconductor Manufacturing. _c/ Semicon. |
||
| 260 |
_aCalifornia _b: Semicon West _c,2003. |
||
| 300 |
_aii,376p. _c:32cm. |
||
| 655 | _a;SEMI Technology Symposium | ||
| 655 | _a; Innovations in Semiconductor Manufacturing | ||
| 655 | _a; Semiconductor Manufacturing | ||
| 655 | _a; HCL Collection. | ||
| 942 |
_2ddc _cHCL |
||
| 999 |
_c40986 _d40986 |
||