| 000 | 00769nam a22002297a 4500 | ||
|---|---|---|---|
| 003 | SNU | ||
| 005 | 20150202223502.0 | ||
| 008 | 140814b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0819457361 | ||
| 028 | _aHCL | ||
| 082 | _a621.381 LIE | ||
| 100 | _aLiebmann, Lars W. | ||
| 245 |
_aDesign and Process Integration for Microelectronic Manufacturing III _b: 3-4 March 2005. San Jose, California, USA. _c/ Lars W. Liebmann |
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| 260 |
_aCalifornia _b: SPIE _c, 2005. |
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| 300 |
_axxxv, 438 p. _c, 30 cm. |
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| 440 |
_aProceedings of SPIE _vVol. 5756 |
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| 655 | _aDesign and Process Integration for Microelectronic Manufacturing III | ||
| 655 | _aLars W. Liebmann | ||
| 655 | _aSPIE | ||
| 655 | _aInternational Society for Optical Engineering | ||
| 942 |
_2ddc _cHCL |
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| 999 |
_c41674 _d41674 |
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