000 00524 a2200181 4500
003 SNU
005 20140411234803.0
008 120806t xxu||||| |||| 00| 0 eng d
020 _a9780471329985
082 _a537.622 GRO
100 _aGrove, A. S.
_92422
245 _aPhysics and Technology of Semiconductor Devices
_cA. S. Grove
260 _aNew York
_bJohn Wiley & Sons
300 _bxix; 366p.
365 _b11089
655 _bPhysics
_bTechnology
_bSemiconductor Device
_bThermal Oxidation
_92423
942 _2ddc
_cBOOK
999 _c5037
_d5037