| 000 | 00521nam a2200157Ia 4500 | ||
|---|---|---|---|
| 999 |
_c51196 _d51196 |
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| 005 | 20190625121238.0 | ||
| 008 | 190531s9999 xx 000 0 und d | ||
| 100 | _aHarsh Kalra/Mani ViG | ||
| 245 | 0 | _aWafer Stage Design for Photo-Lithography | |
| 260 |
_aShiv Nadar University _bElectronics and Communication Engineering _cMay-19 |
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| 300 |
_a22 p. _b: Hard Bound. _c:29cm. |
||
| 655 | _aProject Report. | ||
| 700 | _aAtul Vir Singh | ||
| 856 | _uhttp://dspace.snu.edu.in:8080/jspui/handle/123456789/583 | ||
| 942 | _cPR | ||