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_aS.R.Book Distributors _b12 Satyam Enclave, Ghaziabad-201009 _c938 _d27/05/2013 |
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| 082 | _a621.381 RAI | ||
| 100 | _a Rai-Choudhury, P. | ||
| 245 |
_a MEMS and MOEMS Technology and Applications _c/P Rai-Choudhury |
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| 260 |
_aWash. _b: SPIE Optical Engineering Press, _c ©2000 |
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| 300 |
_axi, 520 p. _b: ill. _c; 27 cm. |
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| 440 | _aSPIE Press monograph, PM85 | ||
| 655 |
_bMicroelectromechanical systems _b, Optoelectronic devices. _b, Optoelectronic devices _b, Microelectromechanical Systems _b, Rai-Choudhury, P. _band MEMS and MOEMS Technology and Applications |
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| 942 |
_2ddc _cBOOK |
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| 999 |
_c8886 _d8886 |
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