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Semiconductor manufacturing handbook

Geng, Hwaiyu ; Albrecht, David J

Semiconductor manufacturing handbook / Hwaiyu Geng - New York : McGraw-Hill , ©2005. - 1 v. (various pagings) : ill. ; 25 cm.

ISBN: 9780071445597

Publisher. No.: HCL

Index Terms--Genre/Form:
Semiconductors -- Design and construction -- Handbooks, manuals, etc.
Integrated circuits -- Design and construction -- Handbooks, manuals, etc.
Wafer processing
Hwaiyu Geng
Communication

Dewey Class. No.: 621.38152 GEN

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