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Thin-film deposition

Smith, Donald L.

Thin-film deposition : principles and practice / Donald L Smith - New York McGraw-Hill 1995 - xxiii, 616 p. : ill. 24 cm.

ISBN: 9780070585027

Publisher. No.: HCL

Index Terms--Genre/Form:
Donald L Smith
Thin-film deposition : principles and practice
Thin films.
Vapor-plating.
Thin film devices.
Epitaxy
Chemical vapour deposition -- Electronics

Dewey Class. No.: 621.38152 SMI

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