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Design and simulation of MEMS based piezoresistive pressure sensor

P,Harish Reddy ;Sajja,Prudhvi Krishna

Design and simulation of MEMS based piezoresistive pressure sensor /Harish Reddy P ;Prudhvi Krishna Sajja - Dadri Shiv Nadar University ,Dept. Of Electrical Engineering ,May 2017 - vii,43 p. - Department of Electrical Engineering Under Supervision of Atul Vir Singh . .

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