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MEMS and MOEMS Technology and Applications

Rai-Choudhury, P.

MEMS and MOEMS Technology and Applications /P Rai-Choudhury - Wash. : SPIE Optical Engineering Press, ©2000 - xi, 520 p. : ill. ; 27 cm. - SPIE Press monograph, PM85 .

ISBN: 9780819437167

Publisher. No.: S.R.Book Distributors 12 Satyam Enclave, Ghaziabad-201009

Index Terms--Genre/Form: --Microelectromechanical systems--, Optoelectronic devices.--, Optoelectronic devices--, Microelectromechanical Systems--, Rai-Choudhury, P.--and MEMS and MOEMS Technology and Applications

Dewey Class. No.: 621.381 RAI

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