Introduction to microlithography
Bowden, M. J., 1943- Thompson, L. F., 1944- Willson, C. G. 1939-
Introduction to microlithography / M. J. Bowden - 2nd ed. - Washington, DC American Chemical Society 1994 - xiv, 527 p. : ill. 24 cm. - ACS professional reference book. .
9780841228485
HCL
ACS professional reference book.
L F Thompson; C G Willson; M J Bowden
Introduction to microlithography, 2nd edition
Photoresists -- Congresses.
Plasma etching -- Congresses.
621.381531 BOW
Introduction to microlithography / M. J. Bowden - 2nd ed. - Washington, DC American Chemical Society 1994 - xiv, 527 p. : ill. 24 cm. - ACS professional reference book. .
9780841228485
HCL
ACS professional reference book.
L F Thompson; C G Willson; M J Bowden
Introduction to microlithography, 2nd edition
Photoresists -- Congresses.
Plasma etching -- Congresses.
621.381531 BOW
