Introduction to microlithography (Record no. 23066)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00843nam a22002537a 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | SNU |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20140804230953.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140804b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780841228485 |
| 028 ## - DISTRIBUTOR NAME | |
| Distributor Name | HCL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION | |
| Classification number | 621.381531 BOW |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Bowden, M. J., 1943- |
| -- | Thompson, L. F., 1944- |
| -- | Willson, C. G. 1939- |
| 245 ## - TITLE STATEMENT | |
| Title | Introduction to microlithography |
| Statement of responsibility, etc | / M. J. Bowden |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Washington, DC |
| Name of publisher, distributor, etc | American Chemical Society |
| Date of publication, distribution, etc | 1994 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 527 p. |
| Other physical details | : ill. |
| Dimensions | 24 cm. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | ACS professional reference book. |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | ACS professional reference book. |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | L F Thompson; C G Willson; M J Bowden |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Introduction to microlithography, 2nd edition |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Photoresists -- Congresses. |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Plasma etching -- Congresses. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | HCL Collection |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Withdrawn | Dewey Decimal Classification | SNU LIBRARY | SNU LIBRARY | 04/08/2014 | 621.381531 BOW | H8290 | 04/08/2014 | 04/08/2014 | HCL Collection |
