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Microsystem design

Senturia, Stephen D.

Microsystem design /Stephen D Senturia - Boston : Kluwer Academic Publishers , 2001. - xxvi, 689 p. : ill. ; 24 cm.

ISBN: 9780792372462

Publisher. No.: HCL

Index Terms--Genre/Form:
Microelectronics.
Microelectromechanical systems --
Design and construction.
System design.
Electronics

Dewey Class. No.: 621.381 SEN

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