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Design and Process Integration for Microelectronic Manufacturing III

Liebmann, Lars W.

Design and Process Integration for Microelectronic Manufacturing III : 3-4 March 2005. San Jose, California, USA. / Lars W. Liebmann - California : SPIE , 2005. - xxxv, 438 p. , 30 cm. - Proceedings of SPIE Vol. 5756 .

ISBN: 0819457361

Publisher. No.: HCL

Index Terms--Genre/Form:
Design and Process Integration for Microelectronic Manufacturing III
Lars W. Liebmann
SPIE
International Society for Optical Engineering

Dewey Class. No.: 621.381 LIE

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