Design and Process Integration for Microelectronic Manufacturing III (Record no. 41674)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00769nam a22002297a 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | SNU |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20150202223502.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140814b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0819457361 |
| 028 ## - DISTRIBUTOR NAME | |
| Distributor Name | HCL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION | |
| Classification number | 621.381 LIE |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Liebmann, Lars W. |
| 245 ## - TITLE STATEMENT | |
| Title | Design and Process Integration for Microelectronic Manufacturing III |
| Remainder of title | : 3-4 March 2005. San Jose, California, USA. |
| Statement of responsibility, etc | / Lars W. Liebmann |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | California |
| Name of publisher, distributor, etc | : SPIE |
| Date of publication, distribution, etc | , 2005. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxxv, 438 p. |
| Dimensions | , 30 cm. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | Proceedings of SPIE |
| Volume number/sequential designation | Vol. 5756 |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Design and Process Integration for Microelectronic Manufacturing III |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Lars W. Liebmann |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | SPIE |
| 655 ## - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | International Society for Optical Engineering |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | HCL Collection |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Withdrawn | Dewey Decimal Classification | SNU LIBRARY | SNU LIBRARY | 02/02/2015 | 621.381 LIE | H15115 | 02/02/2015 | 02/02/2015 | HCL Collection |
