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Micro process engineering

Kockmann, Norbert;

Micro process engineering : fundamentals, devices, fabrication, and applications /Norbert Kockmann - USA :Wiley Pup. :2013 - xxii 507p. 24cm - Advanced micro & nanosystems .

ISBN: 9783527335008

Publisher. No.: Global Alliance Books Distributors : A-312, Nanad Nikunj Meerut Road Ghaziabad

Index Terms--Genre/Form:
Manufacturing Engineering
Production engineering.
Microtechnology.
Production, Technique
Microtechnologie.
Norbert Kockmann
and Micro process engineering : fundamentals, devices, fabrication, and applications

Dewey Class. No.: 670.42 KOC

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