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Foundations of MEMS

Liu, Chang,

Foundations of MEMS / Chang Liu, . - 2nd ed. - New Jersey : Pearson/Prentice Hall, ©2006. - xxii, 576p. 24cm.

ISBN: 9788131764756

Publisher. No.: Researcho Books & Periodicals Pvt. Ltd. :4735/22 2nd Floor Prakash Deep Building ( Near Delhi Medical Association ) Ansari Road Darya Ganj New Delhi Researcho Books & Periodicals Pvt. Ltd. :4735/22 2nd Floor Prakash Deep Building ( Near Delhi Medical Association ) Ansari Road Darya Ganj New Delhi Researcho Books & Periodicals Pvt. Ltd. :4735/22 2nd Floor Prakash Deep Building ( Near Delhi Medical Association ) Ansari Road Darya Ganj New Delhi

Index Terms--Genre/Form:
Applied physics
MEMS.
Microelectromechanical systems.
Thermal Sensing
Surface Micromachining
Process Synthesis
Chang Liu
and Foundations of MEMS

Dewey Class. No.: 621.3 LIU

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