Metrology, inspection, and process control for microlithography XVIII 23-26 February 2004, Santa Clara, California, USA (Record no. 40470)

MARC details
000 -LEADER
fixed length control field 00760nam a22002297a 4500
003 - CONTROL NUMBER IDENTIFIER
control field SNU
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20141218124937.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 141218b xxu||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0819452882
028 ## - DISTRIBUTOR NAME
Distributor Name ;HCL
082 ## - DEWEY DECIMAL CLASSIFICATION
Classification number 621.381531 SIL
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name ;Silver, Richard M.
245 ## - TITLE STATEMENT
Title Metrology, inspection, and process control for microlithography XVIII 23-26 February 2004, Santa Clara, California, USA
Statement of responsibility, etc / Richard M Silver.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Santa Clara
Name of publisher, distributor, etc :SPIE
Date of publication, distribution, etc ,2004.
300 ## - PHYSICAL DESCRIPTION
Extent xl,720p.
Dimensions :30cm.
655 ## - INDEX TERM--GENRE/FORM
Genre/form data or focus term ;Metrology, inspection, and process control for microlithography
655 ## - INDEX TERM--GENRE/FORM
Genre/form data or focus term ;Microlithography
655 ## - INDEX TERM--GENRE/FORM
Genre/form data or focus term ;SPIE
655 ## - INDEX TERM--GENRE/FORM
Genre/form data or focus term ;International Society for Optical Engineering
655 ## - INDEX TERM--GENRE/FORM
Genre/form data or focus term ;HCL Collection.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Dewey Decimal Classification
Koha item type HCL Collection
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
Withdrawn   Dewey Decimal Classification     SNU LIBRARY SNU LIBRARY 18/12/2014   621.381531 SIL H14201 18/12/2014 18/12/2014 HCL Collection
Withdrawn   Dewey Decimal Classification     SNU LIBRARY SNU LIBRARY 18/12/2014   621.381531 SIL H14202 18/12/2014 18/12/2014 HCL Collection
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