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1.
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Introduction to microlithography / M. J. Bowden by Series: ACS professional reference book
Edition: 2nd ed.
Material type: Text Text; Format: print ; Literary form: Not fiction
Publisher number:
  • HCL
Publication details: Washington, DC American Chemical Society 1994
Availability: Not available: SNU LIBRARY: Withdrawn (1).

2.
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Metrology, inspection, and process control for microlithography XVIII 23-26 February 2004, Santa Clara, California, USA / Richard M Silver. by
Material type: Text Text; Format: print ; Literary form: Not fiction
Publisher number:
  • ;HCL
Publication details: Santa Clara :SPIE ,2004
Availability: Not available: SNU LIBRARY: Withdrawn (2).


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