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Design and Process Integration for Microelectronic Manufacturing III : 3-4 March 2005. San Jose, California, USA. / Lars W. Liebmann
Material type:
TextPublisher number: HCLSeries: Proceedings of SPIE ; Vol. 5756Publication details: California : SPIE , 2005.Description: xxxv, 438 p. , 30 cmISBN: - 0819457361
- 621.381 LIE
| Item type | Current library | Call number | Status | Barcode | |
|---|---|---|---|---|---|
HCL Collection
|
SNU LIBRARY | 621.381 LIE (Browse shelf(Opens below)) | Withdrawn | H15115 |
Total holds: 0
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