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Fundamentals of microfabrication

Madou, Marc J.

Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou - 2nd ed. - Boca Raton, Fla. CRC Press 2002 - 723 p. : col. ill. ; 29 cm.

ISBN: 9780849308260

Publisher. No.: HCL

Index Terms--Genre/Form:
Marc J Madou
Fundamentals of microfabrication : the science of miniaturization
Microelectronics.
Integrated circuits -- Design and construction.
Microelectromechanical systems -- Design and construction.
Microelectronic packaging.
Lasers -- Industrial applications.

Dewey Class. No.: 621.38152 MAD

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